DODGEN

Silane(SiH4): Electronic Special Gas

Silane(SiH4)——electronic special gas, chlorosilane process to produce SiH4, easy to obtain raw materials, mild conditions, easy to enlarge.

Technical Introduction of SiH4 Process Technology

Si + 3SiCl₄+ 2H₂→ 4SiHCl₃

2SiCl₄+ 2H₂+ Si + HCl → 3SiHCl₃

4SiHCl₃→ 3SiCl₄+ SiH₄

1 Ultifunctional reactor route based on reaction rectification

2 Conversion rate: 0.2%(xeq) → Nearly 100%

3 Material cycle: A reduction of nearly 90%

4 Equipment investment: Reduced by more than 20%

5 Operating cost: Reduced by more than 30%

5 The purity of the product is above 6N(99.9999%)

Tecnología de procesos

Equipos de separación

Reactor de flujo continuo

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