Technical Introduction of SiH4 Process Technology
Industrial silicon gasification
Si + 3SiCl4 + 2H2 → 4SiHCl3
2SiCl4 + 2H2+ Si + HCl → 3SiHCl3
Trichlorosilane disproportionation
4SiHCl3 → 3SiCl4 + SiH4
Ultifunctional reactor route based on reaction rectification
Conversion rate: 0.2%(xeq) → Nearly 100%
Material cycle: A reduction of nearly 90%
Equipment investment: Reduced by more than 20%
Operating cost: Reduced by more than 30%
The purity of the product is above 6N(99.9999%)
